Mass spectrometric investigation and formation mechanisms of high-mass species in the downstream region of Ar/CF4/O2 plasmas

Literature Information

Publication Date 2008-12-11
DOI 10.1039/B814147A
Impact Factor 3.676
Authors

Kenji Furuya, Akihiro Ide, Hiroshi Okumura, Akira Harata


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Abstract

Mass analysis has been conducted on the positive ions and neutral species in the downstream region of Ar/CF4/O2 plasmas. The neutral species have been ionized by Li+ attachment before mass analysis. The CF2O+, C2F5O+ and CnF2n−1O+ (1 ≤n≤ 6) positive ions and the CnF2nO (1 ≤n≤ 7) neutral species have been found as the species composed of C, F and O. The intensity of C2F4O observed via the Li+-attachment mass spectra has been exceptionally weak in comparison to the intensities of CF2O and C3F6O. In addition, neither C2F4 nor C3F6 have been observed, although CnF2n (n≥ 4) have been observed as the species composed only of C and F. These findings suggest that CnF2nO (n≥ 3) are produced mainly through the following reactions: CF3(CF2)mCF = CF2 + O(3P) → CF2(3B1) + CF3(CF2)mCFO (m≥ 1) and CF3(CF2)mCF = CF(CF2)nCF3 + O(3P) → CF3(CF2)mCF + CF3(CF2)nCFO (m, n≥ 1), where the CF3(CF2)n– group might have side chains, as in (CF3)2CF(CF2)n−2–. With the help of quantum chemistry calculations of reaction enthalpies and transition states, the formation mechanisms of the observed species have been discussed in detail.

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