Nanostructured silicon surfaces via nanoporous alumina

Literature Information

Publication Date 2003-05-13
DOI 10.1039/B301340E
Impact Factor 6.222
Authors

Matthias Kruse, Steffen Franzka, Günter Schmid


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Abstract

Nanostructured silicon surfaces are generated using nanoporous alumina membranes as stamps to imprint PMMA films on silicon, followed by reactive ion etching (RIE).

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