Electrochemical lithography: fabrication of nanoscale Si tips by porous anodization of Al/Si wafer

Literature Information

Publication Date 2004-03-18
DOI 10.1039/B315810A
Impact Factor 6.222
Authors

L. Pu, Y. Shi, J. M. Zhu, X. M. Bao, R. Zhang, Y. D. Zheng


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Abstract

Porous anodization of Al/Si wafer in sulfuric acid results in the formation of Si nanotips on the surface of Si substrate with ultrahigh packing density.

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