Compound Q&A
What industries use Methyl (diethoxyphosphoryl)acetate (CAS: 1067-74-9)?
Answer
Methyl (diethoxyphosphoryl)acetate (CAS: 1067-74-9) is used in various industries, including pharmaceuticals for the synthesis of certain compounds, polymers for modifying properties, and sensors for detecting specific chemical species. It is also employed in semiconductor manufacturing for cleaning and etching processes due to its reactive nature.
About
CAS No
1067-74-9
English Name
Methyl (diethoxyphosphoryl)acetate
Molecular Formula
C7H15O5P
Molecular Weight
210.17 g/mol
SMILES
CCOP(=O)(CC(=O)OC)OCC
InChIKey
CTSAXXHOGZNKJR-UHFFFAOYSA-N
Last Updated: 2025-09-13 09:53
