Investigation of CsPbBr3 CVD dynamics at various temperatures
Literature Information
Chenyang Bao, Xiang Peng, Leiying Ying, Yang Mei, Baoping Zhang, Hao Long
Since the emerging development of CsPbBr3 perovskite, chemical vapor deposition (CVD) has become one of the most promising fabrication techniques by which to precisely deposit uniform perovskite thin films. However, there have been few reports on the growth dynamics and chemical reaction parameters (e.g., activation energy) for perovskite CVD. In this work, different deposition rates of CVD-grown CsPbBr3 thin films were obtained at different substrate temperatures. Dynamics equations were developed to relate the inflow rates, desorption coefficients and concentrations of reactants on the substrates. Only a small amount of reactant became activated at low temperature and a small amount of PbBr2 resided on the substrate at high temperature, and accordingly the maximal deposition rate was achieved at 250 °C. The Arrhenius activation energy of CVD-grown CsPbBr3 was also calculated, and found to be 31.64 kJ mol−1. We believe that our work provides a detailed picture of perovskite CVD growth.
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Physical Chemistry Chemical Physics

Physical Chemistry Chemical Physics (PCCP) is an international journal co-owned by 19 physical chemistry and physics societies from around the world. This journal publishes original, cutting-edge research in physical chemistry, chemical physics and biophysical chemistry. To be suitable for publication in PCCP, articles must include significant innovation and/or insight into physical chemistry; this is the most important criterion that reviewers and Editors will judge against when evaluating submissions. The journal has a broad scope and welcomes contributions spanning experiment, theory, computation and data science. Topical coverage includes spectroscopy, dynamics, kinetics, statistical mechanics, thermodynamics, electrochemistry, catalysis, surface science, quantum mechanics, quantum computing and machine learning. Interdisciplinary research areas such as polymers and soft matter, materials, nanoscience, energy, surfaces/interfaces, and biophysical chemistry are welcomed if they demonstrate significant innovation and/or insight into physical chemistry. Joined experimental/theoretical studies are particularly appreciated when complementary and based on up-to-date approaches.










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