Nanopatterning by ion implantation through nanoporous alumina masks

Literature Information

Publication Date 2013-02-04
DOI 10.1039/C3CP50196E
Impact Factor 3.676
Authors

Wei Guan, Ian M. Ross, Umananda M. Bhatta, Jay Ghatak, Nianhua Peng, Beverley J. Inkson, Günter Möbus


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Abstract

The important problem of how to generate lateral order for ion implantation patterning of substrates is solved by using a nanoporous anodic alumina membrane as a mask. Co and Pt implantation is used at two implantation doses. In order to observe the achieved implantation zones free from artifacts, electron transparent thin nitride and oxide films are used as substrates, which allows the quality of pattern transfer from the mask to the thin film to be assessed by plan-view transmission electron microscopy. Characteristic density variations of implanted elements across projected pore-regions of the mask, such as ring and dome shapes, and corresponding variation of cluster size are discussed, and therefore the method also serves as a suitable test bed for ion beam focusing studies by cylindrical or conical pores.

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DOI: 10.1039/B6RP90009G

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DOI: 10.1039/CS99625FX025

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DOI: 10.1039/AN884090190B

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DOI: 10.1039/CS99625FP017

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DOI: 10.1039/CS97302FX001

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DOI: 10.1039/CS99524BX015

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DOI: 10.1039/CS99625BX019

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DOI: 10.1039/B6RP90042A

Proceedings of the Society of Public Analysts

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DOI: 10.1039/AN884090073A

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DOI: 10.1039/CS97504FP001

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Physical Chemistry Chemical Physics

Physical Chemistry Chemical Physics
CiteScore: 5.5
Self-citation Rate: 10.3%
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Physical Chemistry Chemical Physics (PCCP) is an international journal co-owned by 19 physical chemistry and physics societies from around the world. This journal publishes original, cutting-edge research in physical chemistry, chemical physics and biophysical chemistry. To be suitable for publication in PCCP, articles must include significant innovation and/or insight into physical chemistry; this is the most important criterion that reviewers and Editors will judge against when evaluating submissions. The journal has a broad scope and welcomes contributions spanning experiment, theory, computation and data science. Topical coverage includes spectroscopy, dynamics, kinetics, statistical mechanics, thermodynamics, electrochemistry, catalysis, surface science, quantum mechanics, quantum computing and machine learning. Interdisciplinary research areas such as polymers and soft matter, materials, nanoscience, energy, surfaces/interfaces, and biophysical chemistry are welcomed if they demonstrate significant innovation and/or insight into physical chemistry. Joined experimental/theoretical studies are particularly appreciated when complementary and based on up-to-date approaches.

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