Selective focused-ion-beam sculpting of TiO2nanotubes and mechanism understanding

Literature Information

Publication Date 2012-12-05
DOI 10.1039/C2CP43354K
Impact Factor 3.676
Authors

Bo Chen, Kathy Lu


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Abstract

Anodic TiO2 nanotubes with different structures, doping agents, and decorations have been studied in order to improve energy conversion and storage efficiencies such as in dye sensitized solar cells, solar fuels, and electrochemical supercapacitors. However, the top surface modification of TiO2 nanotubes has never been addressed. In this study, anodic TiO2 nanotubes have been selectively closed by high energy focused ion beams and re-opened by low energy focused ion beams. Under a 30 kV Ga+ beam, TiO2 nanotubes are closed with a 65 nm shield layer covering the top entrance when the ion dose is larger than 1.2 × 1017 ions per cm2; under a 5 kV Ga+ beam, the shield layer is removed and the closed tubes are re-opened. An ion-induced viscous flow model has been proposed to explain the influence of Ga+ ion beam flux, substrate temperature, initial tube diameter, ion beam dwell time, and the incidence angle of the ion beam.

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Physical Chemistry Chemical Physics

Physical Chemistry Chemical Physics
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