IEEE Transactions on Semiconductor Manufacturing

Basic Information

Brief Name: IEEE T SEMICONDUCT M
Impact Factor: 2.3
ISSN: 0894-6507
Research Field: ENGINEERING TECHNOLOGY
h-index: 59
Self-citation Rate: 13%
Articles per Year: 74

SCI Index Status: Science Citation Index Expanded
Journal Website: https://ieeexplore.ieee.org/xpl/RecentIssue.jsp?punumber=66
Journal Introduction:

The IEEE Transactions on Semiconductor Manufacturing addresses the challenging problems of manufacturing complex microelectronic components, especially very large scale integrated circuits (VLSI). Manufacturing these products requires precision micropatterning, precise control of materials properties, ultraclean work environments, and complex interactions of chemical, physical, electrical and mechanical processes.

CiteScore

CiteScore
5.2
SJR
0.967
SNIP
1.237
Subject Rank Percentile
EngineeringIndustrial and Manufacturing Engineering
114 / 384 70%

Journal Statistics

Quarterly
Issues/Year
Review Cycle
Article Processing Fee

Submission Information

Submission Website:

http://mc.manuscriptcentral.com/tsm-ieee

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Front cover

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