IEEE Transactions on Semiconductor Manufacturing
Basic Information
The IEEE Transactions on Semiconductor Manufacturing addresses the challenging problems of manufacturing complex microelectronic components, especially very large scale integrated circuits (VLSI). Manufacturing these products requires precision micropatterning, precise control of materials properties, ultraclean work environments, and complex interactions of chemical, physical, electrical and mechanical processes.
CiteScore
| Subject | Rank | Percentile |
|---|---|---|
EngineeringIndustrial and Manufacturing Engineering |
114 / 384 | 70% |
Journal Statistics
Submission Information
Submission Website:
http://mc.manuscriptcentral.com/tsm-ieeeRelated Articles
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The crystal structure and chemical state of aluminum-doped hydroxyapatite by experimental and first principles calculation studies
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DOI: 10.1039/C6CP03483G
Experimental approach to the fundamental limit of the extinction coefficients of ultra-smooth and highly spherical gold nanoparticles
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