Compound Q&A
What industries use Chloro(trimethoxy)silane (CAS: 4668-00-2)?
Answer
Chloro(trimethoxy)silane (CAS: 4668-00-2) is widely used in the semiconductor industry for the production of organosilicon compounds and as a precursor in silicon nitride films. It is also utilized in the pharmaceutical, polymer, and sensor industries for the synthesis of functionalized silanes and as crosslinking agents.
About
CAS No
4668-00-2
English Name
Chloro(trimethoxy)silane
Molecular Formula
C3H9ClO3Si
Molecular Weight
156.64 g/mol
SMILES
CO[Si](OC)(OC)Cl
InChIKey
CBVJWBYNOWIOFJ-UHFFFAOYSA-N
Last Updated: 2025-09-29 09:43
