How is Tris(2,2,2-trifluoroethyl) phosphate (CAS: 358-63-4) typically synthesized?

Tris(2,2,2-trifluoroethyl) phosphate is typically synthesized via the reaction of 2,2,2-trifluoroethanol with phosphorus oxychloride or phosphorus trichloride. The reaction involves the formation of a phosphorus oxyfluoride intermediate, followed by hydrolysis with water or alcohol to produce the desired phosphate ester. The process requires careful control of temperature and reagent ratio to achieve high yield and selectivity.