Compound Q&A
What industries use Trisilicon tetranitride (alpha) (CAS: 12033-89-5)?
Answer
Trisilicon tetranitride (alpha) (CAS: 12033-89-5) is used in various industries, including semiconductor manufacturing, where it serves as a precursor for silicon nitride films. It is also utilized in the synthesis of other silicon nitride compounds and in some sensor applications for its high thermal stability and reactivity.
About
CAS No
12033-89-5
English Name
Trisilicon tetranitride (alpha)
Molecular Formula
Si3N4
Molecular Weight
140.28 g/mol
SMILES
N12[Si]34N5[Si]16N3[Si]25N46
InChIKey
HQVNEWCFYHHQES-UHFFFAOYSA-N
Last Updated: 2025-09-07 10:18
